ABSTRACT
The operation of electrophysical pumps is based on the physical and chemical binding of active gases by a film or layer of a getter. Implantation of molecules or ions of these gases in the boundary surfaces is also possible. In developing electrophysical pumps, especially high-throughput units, it is important that their energy parameters and the characteristics of their geometric structure be optimized. The operating conditions must be analyzed in detail and the characteristics of different pump types must be compared for each specific application. An important feature of electrophysical pumps is the pumping selectivity. Electrophysical pumps with plasma sources of getter films operate especially stably under the conditions. The gases usually encountered in vacuum systems can be arranged in a series of increasing sorption energies: inert gases – methane – hydrogen – nitrogen – carbon monoxide – carbon dioxide – oxygen.
