ABSTRACT
This chapter presents an overview of the analysis, simulation, fabrication and characterization studies required for a piezoelectric micropump, with the help of an example case study. A valveless nozzle-diffuser-based design has been explored for the micropump. Piezoelectric micropumps having a valveless nozzle diffuser structure, PDMS membrane and PZT-5H actuator are considered. The trend of piezoelectric micropump technology based on input voltages used for piezoelectric actuation, maximum membrane deflection obtained, and thickness of piezoelectric actuator used is summarized. We shall look into the piezoelectric actuation in detail, carry on the theoretical analysis for a piezoelectric actuator for a micropump and then use a finite element-based method to look at micropump actuation technique. Finally, an approach for fabricating a piezoelectric micropump using photolithography and soft micromoulding technique is presented.
