ABSTRACT
A multi-chroic imaging instrument was developed to study ultrafine defects (UFD) using a dark field imaging system, which includes a few multi-chroic filters to spectrally separate images from the light scattered and/or emitted from the defects. This instrument will simultaneously and independently make images caused by elastic and inelastic light and/or photoluminescence. The instrument incorporates an optical frequency-analyzer to study the nature of the light signal.
