ABSTRACT
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
TABLE OF CONTENTS
part X3.2
ZnO
part X3.5
TiO2
part
In2O3:Sn
part X3.7
Ga2O3-In2O3
part X3.8
ZrO2
part X3.9
ZrOxFy
part X3.10
CeO2
part X3.11
CaF2
part X3.12
MgF2
part X3.13
MgO
part X3.14
VO2
part X3.15
a-C:O:H
part X3.16
SiO2
part X3.17
Ta2O5
part X3.18
SiO2/Si3N4/TiO2/Ag
part X3.19
Cr/Si3N4
part X3.20
HfO2